MAGNETIC ANNEAL

Annealing process is considered as a good way to improve magnetic property (narrowing line width, increasing permeability, etc.)

What we have

3000 Gauss Magnetic Annealing Furnace

Tool for annealing magnetic thin films and integrated magnetic devices on Max 8 inch substrates in a quartz core tube oven under the vacuum condition or inactive atmosphere.

Features

  • Superconducting Magnet
  • Capacity 25 wafers
  • Quartz core tube oven
  • Annealing Temperature: 150 to 400 ºC (Max. 500 ºC)
  • Horizontal 3 zone heater with high temperature uniformity
  • Vacuum < 10-7Torr
  • Max wafer size: 8 inch
  • Automatic wafer handling system
  • Throughput 11 wafers/hour at 2hours soaking anneal
  • Clean Air flow system

magnetic annealing furnace


Annealing Performance (Testing Magnetic Samples)

 

magnetic annealing result 3 magnetic annealing result 2